Microfabrication and microsensors

Shuichi Shoji; Masayoshi Esashi

doi:10.1007/BF02918525

Microfabrication and microsensors

Shuichi Shoji^*, Masayoshi Esashi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as a microvalve and a micropump for integrated chemical analysis systems, are also described.

Original language	English
Pages (from-to)	21-34
Number of pages	14
Journal	Applied Biochemistry and Biotechnology
Volume	41
Issue number	1-2
DOIs	https://doi.org/10.1007/BF02918525
Publication status	Published - 1993 Apr 1
Externally published	Yes

Keywords

LSI technologies
Microsensors
microfabrication
micromachining

ASJC Scopus subject areas

Biotechnology
Bioengineering
Biochemistry
Applied Microbiology and Biotechnology
Molecular Biology

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10.1007/BF02918525

Cite this

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AB - In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as a microvalve and a micropump for integrated chemical analysis systems, are also described.

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Microfabrication and microsensors

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

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