Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems

Shuichi Shoji

doi:10.1109/IMNC.1999.797482

Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems

Shuichi Shoji^*

^*Corresponding author for this work

School of Fundamental Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Citations (Scopus)

Abstract

Micromachining, based on photolithography commonly used in integrated circuit technology, has been applied to miniaturize chemical and bio-chemical analysis systems. Micro/miniaturized total analysis systems (μTAS), developed so far, can be classified into two groups. One is a MEMS-type system using pressurized flow by mechanical flow control devices, for example, microvalves and micropumps. The other uses electrically driven liquid handling without mechanical elements. Typically electroosmotic flow has been used so far. Planar capillary electrophoresis (chip CE) type systems are the common application of this method. Microfabrication technologies and micro flow control devices applied to the chemical and biochemical micro flow systems are reviewed.

Original language	English
Title of host publication	1999 International Microprocesses and Nanotechnology Conference
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	72-73
Number of pages	2
ISBN (Electronic)	4930813972, 9784930813978
DOIs	https://doi.org/10.1109/IMNC.1999.797482
Publication status	Published - 1999
Event	1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan Duration: 1999 Jul 6 → 1999 Jul 8

Publication series

Name	1999 International Microprocesses and Nanotechnology Conference

Other

Other	1999 International Microprocesses and Nanotechnology Conference
Country/Territory	Japan
City	Yokohama
Period	99/7/6 → 99/7/8

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/IMNC.1999.797482

Cite this

Shoji, S. (1999). Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems. In 1999 International Microprocesses and Nanotechnology Conference (pp. 72-73). Article 797482 (1999 International Microprocesses and Nanotechnology Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1999.797482

Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems. / Shoji, Shuichi.
1999 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc., 1999. p. 72-73 797482 (1999 International Microprocesses and Nanotechnology Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Shoji, S 1999, Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems. in 1999 International Microprocesses and Nanotechnology Conference., 797482, 1999 International Microprocesses and Nanotechnology Conference, Institute of Electrical and Electronics Engineers Inc., pp. 72-73, 1999 International Microprocesses and Nanotechnology Conference, Yokohama, Japan, 99/7/6. https://doi.org/10.1109/IMNC.1999.797482

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abstract = "Micromachining, based on photolithography commonly used in integrated circuit technology, has been applied to miniaturize chemical and bio-chemical analysis systems. Micro/miniaturized total analysis systems (μTAS), developed so far, can be classified into two groups. One is a MEMS-type system using pressurized flow by mechanical flow control devices, for example, microvalves and micropumps. The other uses electrically driven liquid handling without mechanical elements. Typically electroosmotic flow has been used so far. Planar capillary electrophoresis (chip CE) type systems are the common application of this method. Microfabrication technologies and micro flow control devices applied to the chemical and biochemical micro flow systems are reviewed.",

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Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems

Abstract

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ASJC Scopus subject areas

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