S. Shoji*, M. Esashi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


In order to fabricate circuit integrated microsensors, micro fabrication techniques based on LSI technologies, that micro-machining, play important roles. In this section useful micro-machining techniques for fabricating integrated sensors are described. The micropackaged structure for integrated sensors is also introduced.

Original languageEnglish
Pages (from-to)47-57
Number of pages11
JournalHandbook of Sensors and Actuators
Publication statusPublished - 1996 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Instrumentation
  • Electrical and Electronic Engineering


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