Micromachining

S. Shoji; M. Esashi

doi:10.1016/S1386-2766(96)80029-6

Micromachining

S. Shoji^*, M. Esashi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

In order to fabricate circuit integrated microsensors, micro fabrication techniques based on LSI technologies, that micro-machining, play important roles. In this section useful micro-machining techniques for fabricating integrated sensors are described. The micropackaged structure for integrated sensors is also introduced.

Original language	English
Pages (from-to)	47-57
Number of pages	11
Journal	Handbook of Sensors and Actuators
Volume	3
DOIs	https://doi.org/10.1016/S1386-2766(96)80029-6
Publication status	Published - 1996 Dec 1
Externally published	Yes

ASJC Scopus subject areas

Control and Systems Engineering
Instrumentation
Electrical and Electronic Engineering

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10.1016/S1386-2766(96)80029-6

Cite this

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title = "Micromachining",

abstract = "In order to fabricate circuit integrated microsensors, micro fabrication techniques based on LSI technologies, that micro-machining, play important roles. In this section useful micro-machining techniques for fabricating integrated sensors are described. The micropackaged structure for integrated sensors is also introduced.",

author = "S. Shoji and M. Esashi",

year = "1996",

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day = "1",

doi = "10.1016/S1386-2766(96)80029-6",

language = "English",

volume = "3",

pages = "47--57",

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AU - Shoji, S.

AU - Esashi, M.

PY - 1996/12/1

Y1 - 1996/12/1

N2 - In order to fabricate circuit integrated microsensors, micro fabrication techniques based on LSI technologies, that micro-machining, play important roles. In this section useful micro-machining techniques for fabricating integrated sensors are described. The micropackaged structure for integrated sensors is also introduced.

AB - In order to fabricate circuit integrated microsensors, micro fabrication techniques based on LSI technologies, that micro-machining, play important roles. In this section useful micro-machining techniques for fabricating integrated sensors are described. The micropackaged structure for integrated sensors is also introduced.

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DO - 10.1016/S1386-2766(96)80029-6

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JO - Handbook of Sensors and Actuators

JF - Handbook of Sensors and Actuators

ER -

Micromachining

Abstract

ASJC Scopus subject areas

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