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Micromachining
S. Shoji
*
, M. Esashi
*
Corresponding author for this work
Research output
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peer-review
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Engineering & Materials Science
Integrated circuits
37%
Machining
64%
Microfabrication
51%
Micromachining
100%
Microsensors
56%
Sensors
41%
Physics & Astronomy
fabrication
24%
integrated circuits
38%
large scale integration
51%
machining
85%
micromachining
91%
sensors
49%