Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors

Jeung Sang Go; Shuichi Shoji

doi:10.1541/ieejsmas.123.510

Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors

Jeung Sang Go, Shuichi Shoji

School of Fundamental Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The flow-induced vibration of the microcantilever is investigated. In particular, to avoid flow disturbance resulting from size of measuring probe, we use the monolithic boron-doped piezoresistive microsensors. By characterizing the dynamic behavior of the microcantilever, the new micromechanics is experimentally determined, completely different from the conventional mechanics in the flow-induced vibration.

Original language	English
Pages (from-to)	510-512
Number of pages	3
Journal	ieej transactions on sensors and micromachines
Volume	123
Issue number	11
DOIs	https://doi.org/10.1541/ieejsmas.123.510
Publication status	Published - 2003

Keywords

flow-induced vibration
microcantilever
natural frequency
piezoresistive sensor
vortex shedding

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1541/ieejsmas.123.510

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abstract = "The flow-induced vibration of the microcantilever is investigated. In particular, to avoid flow disturbance resulting from size of measuring probe, we use the monolithic boron-doped piezoresistive microsensors. By characterizing the dynamic behavior of the microcantilever, the new micromechanics is experimentally determined, completely different from the conventional mechanics in the flow-induced vibration.",

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AB - The flow-induced vibration of the microcantilever is investigated. In particular, to avoid flow disturbance resulting from size of measuring probe, we use the monolithic boron-doped piezoresistive microsensors. By characterizing the dynamic behavior of the microcantilever, the new micromechanics is experimentally determined, completely different from the conventional mechanics in the flow-induced vibration.

KW - flow-induced vibration

KW - microcantilever

KW - natural frequency

KW - piezoresistive sensor

KW - vortex shedding

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Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors

Abstract

Keywords

ASJC Scopus subject areas

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