Abstract
The microstructure and magnetic properties of a Co/Pd multilayer on a controlled Pd/Si seed layer for double-layered perpendicular magnetic recording media were studied. The Pd/Si seed layer, sputter deposited under Ar sputtering gas containing N2 and postannealed at 400°C reduced intergranular exchange coupling of the Co/Pd multilayered films. It was observed that the addition of N2 gas effectively decreased the grain size of Pd in the seed layer. It was found that the Pd/Si seed layer prepared with both processes exhibited a granular structure of fine Pd-rich grains surrounded by a Si-rich amorphous region.
Original language | English |
---|---|
Pages (from-to) | 8023-8029 |
Number of pages | 7 |
Journal | Journal of Applied Physics |
Volume | 95 |
Issue number | 12 |
DOIs | |
Publication status | Published - 2004 Jun 15 |
ASJC Scopus subject areas
- Physics and Astronomy(all)