TY - JOUR
T1 - Microwave atomic force microscopy
T2 - Quantitative measurement and characterization of electrical properties on the nanometer scale
AU - Zhang, Lan
AU - Ju, Yang
AU - Hosoi, Atsushi
AU - Fujimoto, Akifumi
PY - 2012/1
Y1 - 2012/1
N2 - In this paper, we report a noncontact and quantitative method of evaluating and characterizing electrical properties with a nanometer-scale spatial resolution. Microwave atomic force microscopy (M-AFM) can be used to obtain the topography and microwave image of materials in one scanning process simultaneously. Under the frequency modulation (FM) AFM mode, we successfully applied M-AFM to create a microwave image of a Au nanowire with a spatial resolution of 170 nm. Moreover, based on the analytical and explicit expressions proposed, M-AFM can implement the quantitative evaluation and characterization of the local conductivity of materials on the nanometer scale.
AB - In this paper, we report a noncontact and quantitative method of evaluating and characterizing electrical properties with a nanometer-scale spatial resolution. Microwave atomic force microscopy (M-AFM) can be used to obtain the topography and microwave image of materials in one scanning process simultaneously. Under the frequency modulation (FM) AFM mode, we successfully applied M-AFM to create a microwave image of a Au nanowire with a spatial resolution of 170 nm. Moreover, based on the analytical and explicit expressions proposed, M-AFM can implement the quantitative evaluation and characterization of the local conductivity of materials on the nanometer scale.
UR - http://www.scopus.com/inward/record.url?scp=84862926520&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84862926520&partnerID=8YFLogxK
U2 - 10.1143/APEX.5.016602
DO - 10.1143/APEX.5.016602
M3 - Article
AN - SCOPUS:84862926520
SN - 1882-0778
VL - 5
JO - Applied Physics Express
JF - Applied Physics Express
IS - 1
M1 - 016602
ER -