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Miniaturized thin-film magnetic field probe with high spatial resolution for LSI chip measurement
Noriaki Ando*, Norio Masuda, Naoya Tamaki, Toshihide Kuriyama, Kunio Kato, Mikiko Saito, Shinsaku Saito, Keishi Ohashi, Masahiro Yamaguchi
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
21
Citations
(Scopus)