@inproceedings{d891ce6fd58b4132a3eb7f8348c2da7f,
title = "Mn-doping effect on optical absorption of Pb(Zr,Ti)O3 films prepared by aerosol deposition",
abstract = "The Mn-doping effect on the optical absorption of ferroelectric lead zirconate titanate [PZT, Pb(Zr,Ti)O3] films prepared on glass substrates at room temperature by aerosol deposition (AD) were investigated. The optical reflectance and transmittance of the undoped PZT and Mn-doped PZT films were measured in the wavelength range from ultraviolet to near infrared (UV-NIR) and the measured optical spectra were analyzed. The optical absorption of the undoped PZT films was found to be larger than that of the Mn-doped PZT films in the near infrared wavelength range although the analyzed results indicated similar structure for both the undoped PZT and Mn-doped PZT films. Less optical loss and fine dense PZT films with Mn-doping can be deposited by AD at low process temperature.",
keywords = "Aerosol deposition, Mn-doping, Optical absorption, Optical spectroscopy, PZT",
author = "Hiroki Tsuda and Masafumi Nakada and Jun Akedo and Keishi Ohashi",
year = "2008",
month = dec,
day = "1",
language = "English",
isbn = "9781615673339",
series = "4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008",
pages = "475--477",
booktitle = "4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008",
note = "4th International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2008 ; Conference date: 21-04-2008 Through 24-04-2008",
}