Abstract
We have developed a process for multi-step sequential batch self-assembly of complex three-dimensional ferromagnetic micro-structures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged-structures. In our previous study, we found that a non-dimensional factor that depends on its shape determines the sensitivity of the micro hinged-structures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self-assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multi-step sequential assembly by using the non-dimensional factor. Four-step sequential batch assembly was demonstrated using this method.
| Original language | English |
|---|---|
| Article number | TPb41 |
| Pages (from-to) | 588-591 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Publication status | Published - 2005 Oct 25 |
| Externally published | Yes |
| Event | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 2005 Jan 30 → 2005 Feb 3 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering