Abstract
New multilayer thin film optical circuit elements consisting of stacked thin film optical waveguides are fabricated and an optical element with coupling capability between the optical waveguides in the film thickness direction is described.
Original language | English |
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Pages (from-to) | 106-110 |
Number of pages | 5 |
Journal | Electronics & communications in Japan |
Volume | 66 |
Issue number | 2 |
Publication status | Published - 1983 Feb |
ASJC Scopus subject areas
- Engineering(all)