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n-type control by sulfur ion implantation in homoepitaxial diamond films grown by chemical vapor deposition
Masataka Hasegawa, Daisuke Takeuchi, Sadanori Yamanaka, Masahiko Ogura, Hideyuki Watanabe, Naoto Kobayashi, Hideyo Okushi, Koji Kajimura
Research output: Contribution to journal › Article › peer-review
27
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(Scopus)