Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

Minoru Tachiki; Tohru Fukuda; Kenta Sugata; Hokuto Seo; Hitoshi Umezawa; Hiroshi Kawarada

doi:10.1143/jjap.39.4631

Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

Minoru Tachiki, Tohru Fukuda, Kenta Sugata, Hokuto Seo, Hitoshi Umezawa, Hiroshi Kawarada

School of Fundamental Science and Engineering

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Abstract

Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.

Original language	English
Pages (from-to)	4631-4632
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	39
Issue number	7 B
DOIs	https://doi.org/10.1143/jjap.39.4631
Publication status	Published - 2000

Keywords

AFM
Diamond
Electron affinity
Hydrogen termination
SPM
Surface conduction

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.39.4631

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title = "Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation",

abstract = "Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.",

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author = "Minoru Tachiki and Tohru Fukuda and Kenta Sugata and Hokuto Seo and Hitoshi Umezawa and Hiroshi Kawarada",

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T1 - Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

AU - Tachiki, Minoru

AU - Fukuda, Tohru

AU - Sugata, Kenta

AU - Seo, Hokuto

AU - Umezawa, Hitoshi

AU - Kawarada, Hiroshi

PY - 2000

Y1 - 2000

N2 - Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.

AB - Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.

KW - AFM

KW - Diamond

KW - Electron affinity

KW - Hydrogen termination

KW - SPM

KW - Surface conduction

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SN - 0021-4922

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 7 B

ER -

Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

Abstract

Keywords

ASJC Scopus subject areas

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