Nanoscale patterning of protein using electron beam lithography of organosilane self-assembled monolayers

Guo Jun Zhang*, Takashi Tanii, Tamotsu Zako, Takumi Hosaka, Takeo Miyuke, Yuzo Kanari, Takashi Funatsu, Iwao Ohdomari

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

82 Citations (Scopus)


Nanopatterning of self-assembled monolayers (SAM) by electron beam lithography (EB) was developed to produce organic templates for various nanofabrication processes. EB lithography of SAMs provide a method of patterning substrates with proteins with ultrahigh resolution down to sub-10 nm on the scale of single molecule. Green fluorescent proteins (GFP), which is a spontaneous fluorescence protein isolated from the Pacific Jellyfish was chosen as a model protein. A cysteine residue at the c-terminal end of the protein by site-directed mutagenesis for the site specific modification of protein with biotin was introduced. Field-emission scanning electron microscopy was employed to observe nanostructures composed of two different types of organosilane layers. EB lithography of fluorinated SAM as an ideal template enables the high-resolution patterning of proteins with a high signal-to-noise ratio and integration of bioactive proteins into biosensors.

Original languageEnglish
Pages (from-to)833-837
Number of pages5
Issue number8-9
Publication statusPublished - 2005 Aug


  • Biorecognition
  • Nanolithography
  • Patterning
  • Protein design
  • Self-assembled monolayers

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • General Chemistry
  • General Materials Science


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