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Nitrogen ion implantation into ZrN thin films
Naoto Kobayashi
*
, H. Tanoue
*
Corresponding author for this work
Research output
:
Contribution to journal
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Article
›
peer-review
5
Citations (Scopus)
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Engineering & Materials Science
Ion implantation
100%
Thin films
69%
Nitrogen
68%
Temperature
29%
Superconductivity
28%
Lattice constants
27%
Superconducting transition temperature
20%
Structural properties
20%
X ray diffraction
18%
Ions
17%
Experiments
6%
Physics & Astronomy
nitrogen ions
91%
ion implantation
67%
implantation
65%
thin films
38%
fluence
24%
room temperature
16%
electrical resistivity
9%
lattice parameters
6%
superconductivity
6%
transition temperature
5%
conduction
4%
expansion
4%
diffraction
3%
ions
3%
x rays
3%
energy
2%
Chemical Compounds
Ion Implantation
90%
Nitrogen
44%
Ambient Reaction Temperature
41%
Superconductive Transition Temperature
27%
Superconductivity
21%
Lattice Parameter
17%
Electrical Property
15%
X-Ray Diffraction
9%
Ion
7%