Non-destructive evaluation of thin ZnO shear wave transducer by Brillouin scattering

Kazuaki Shintani*, Takahiko Yanagitani, Mami Matsukawa, Takahiko Otani

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

13 Citations (Scopus)


Elastic properties of thin ZnO shear wave transducers have been investigated. These transducer films were fabricated by magnetron sputtering. They are almost composed of unidirectional ZnO crystallites, which were confirmed by X-ray diffraction measurements. The elastic properties of the film seem difficult to evaluate by conventional mechanical measurements. We have then applied a Brillouin scattering technique, which enables the measurement of the hypersonic wave velocity in the GHz range. In spite of the thickness of several micrometers and problems with transparency, we have performed the precise measurement of velocity with estimated errors of 0.5%, which was sufficiently small to evaluate the film.

Original languageEnglish
Pages (from-to)1864-1867
Number of pages4
JournalProceedings - IEEE Ultrasonics Symposium
Publication statusPublished - 2004 Dec 1
Externally publishedYes
Event2004 IEEE Ultrasonics Symposium - Montreal, Que., Canada
Duration: 2004 Aug 232004 Aug 27


  • Anisotropy
  • Brillouin scattering
  • Nondestructive
  • Thin ZnO shear wave transducer

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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