TY - JOUR
T1 - Nonresonant multiphoton ionization of rare gases
AU - Kokubun, Kiyohide
AU - Ichimura, Shingo
AU - Hashizume, Hiroko
AU - Shimizu, Hazime
AU - Oowadano, Yoshiro
AU - Matsumoto, Yuji
AU - Endo, Kazuhiro
N1 - Copyright:
Copyright 2016 Elsevier B.V., All rights reserved.
PY - 1990/7
Y1 - 1990/7
N2 - For the purpose of applying the laser-ionization method to measuring gas pressure, the dependence of the ionization output signals of rare gases on the gas pressure and the laser intensity were studied using XeCl, KrF, and ArF excimer lasers. The proportional relation between the ionization signal and the gas pressure was experimentally verified to below 10 8 Torr. In the case of Kr gas, the dependence of the ionization signal on the laser intensity was in agreement with the theory of nonresonant multiphoton ionization, and saturation of ionization in the case of Xe was observed.
AB - For the purpose of applying the laser-ionization method to measuring gas pressure, the dependence of the ionization output signals of rare gases on the gas pressure and the laser intensity were studied using XeCl, KrF, and ArF excimer lasers. The proportional relation between the ionization signal and the gas pressure was experimentally verified to below 10 8 Torr. In the case of Kr gas, the dependence of the ionization signal on the laser intensity was in agreement with the theory of nonresonant multiphoton ionization, and saturation of ionization in the case of Xe was observed.
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U2 - 10.1116/1.576584
DO - 10.1116/1.576584
M3 - Article
AN - SCOPUS:84914662482
SN - 0734-2101
VL - 8
SP - 3310
EP - 3313
JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
IS - 4
ER -