Normally close microvalve and micropump fabricated on a silicon wafer

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)


A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm2. The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH20/cm2 respectively.

Original languageEnglish
Title of host publicationMicromechanics and MEMS
Subtitle of host publicationClassic and Seminal Papers to 1990
PublisherWiley-IEEE Press
Number of pages6
ISBN (Electronic)9780470545263
ISBN (Print)0780310853, 9780780310858
Publication statusPublished - 1997 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • General Computer Science
  • General Engineering
  • General Physics and Astronomy
  • General Energy


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