Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi; Shuichi Shoji; Akira Nakano

doi:10.1016/0250-6874(89)87114-8

Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi^*, Shuichi Shoji, Akira Nakano

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

144 Citations (Scopus)

Abstract

A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm². The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH₂O respectively.

Original language	English
Pages (from-to)	163-169
Number of pages	7
Journal	Sensors and Actuators
Volume	20
Issue number	1-2
DOIs	https://doi.org/10.1016/0250-6874(89)87114-8
Publication status	Published - 1989 Nov 15
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1016/0250-6874(89)87114-8

Cite this

@article{801f2da7cf0a4bcfa301e64066f1e05e,

title = "Normally closed microvalve and mircopump fabricated on a silicon wafer",

abstract = "A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.",

author = "Masayoshi Esashi and Shuichi Shoji and Akira Nakano",

year = "1989",

month = nov,

day = "15",

doi = "10.1016/0250-6874(89)87114-8",

language = "English",

volume = "20",

pages = "163--169",

journal = "Sensors and Actuators",

issn = "0250-6874",

publisher = "Elsevier BV",

number = "1-2",

}

TY - JOUR

T1 - Normally closed microvalve and mircopump fabricated on a silicon wafer

AU - Esashi, Masayoshi

AU - Shoji, Shuichi

AU - Nakano, Akira

PY - 1989/11/15

Y1 - 1989/11/15

N2 - A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.

AB - A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.

UR - http://www.scopus.com/inward/record.url?scp=0024764864&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0024764864&partnerID=8YFLogxK

U2 - 10.1016/0250-6874(89)87114-8

DO - 10.1016/0250-6874(89)87114-8

M3 - Article

AN - SCOPUS:0024764864

SN - 0250-6874

VL - 20

SP - 163

EP - 169

JO - Sensors and Actuators

JF - Sensors and Actuators

IS - 1-2

ER -

Normally closed microvalve and mircopump fabricated on a silicon wafer

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this