Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi*, Shuichi Shoji, Akira Nakano

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

144 Citations (Scopus)


A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.

Original languageEnglish
Pages (from-to)163-169
Number of pages7
JournalSensors and Actuators
Issue number1-2
Publication statusPublished - 1989 Nov 15
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)


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