TY - GEN
T1 - Notice of Removal
T2 - 2017 IEEE International Ultrasonics Symposium, IUS 2017
AU - Takamura, Yuta
AU - Takayanagi, Shinji
AU - Matsukawa, Mami
AU - Ishida, Chizu
AU - Yanagitani, Takahiko
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/10/31
Y1 - 2017/10/31
N2 - SH-SAW is suitable for liquid sensors to measure conductivity and viscosity because it can propagate without the energy leakage into liquid. We have fabricated a SH-SAW sensor consisting of a c-axis parallel (11-20) oriented ZnO film on a silica glass plate [1]. On the other hand, the long-distance propagation is necessary in order to detect the small changes of the velocity and amplitude. One way to increase propagation distance is wave multiple roundtrips around the sensor. In previous study, the c-axis parallel oriented ZnO film was grown on a part of the glass pipe surface and the SH-BAW roundtrips were demonstrated [2]. However, the SH-SAW roundtrips were not observed because the ZnO film was not grown on the entire surface of the pipe. In this study, we demonstrated the entirepipe-surface deposition of c-axis parallel oriented ZnO film to obtain SH-SAW pipe sensor.
AB - SH-SAW is suitable for liquid sensors to measure conductivity and viscosity because it can propagate without the energy leakage into liquid. We have fabricated a SH-SAW sensor consisting of a c-axis parallel (11-20) oriented ZnO film on a silica glass plate [1]. On the other hand, the long-distance propagation is necessary in order to detect the small changes of the velocity and amplitude. One way to increase propagation distance is wave multiple roundtrips around the sensor. In previous study, the c-axis parallel oriented ZnO film was grown on a part of the glass pipe surface and the SH-BAW roundtrips were demonstrated [2]. However, the SH-SAW roundtrips were not observed because the ZnO film was not grown on the entire surface of the pipe. In this study, we demonstrated the entirepipe-surface deposition of c-axis parallel oriented ZnO film to obtain SH-SAW pipe sensor.
UR - http://www.scopus.com/inward/record.url?scp=85039429893&partnerID=8YFLogxK
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U2 - 10.1109/ULTSYM.2017.8091911
DO - 10.1109/ULTSYM.2017.8091911
M3 - Conference contribution
AN - SCOPUS:85039429893
T3 - IEEE International Ultrasonics Symposium, IUS
BT - 2017 IEEE International Ultrasonics Symposium, IUS 2017
PB - IEEE Computer Society
Y2 - 6 September 2017 through 9 September 2017
ER -