Observing diamond defects with an analytical color fluorescence electron microscope

Kazuhito Nishimura*, Tohru Nakano, Hirotami Koike, Hiroshi Tomimori, Hiroshi Kawarada, Akio Hiraki, Kazuo Ogawa

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


We have developed an analytical color fluorescence electron microscope (ACFEM) which is now being studied as a possible tool for evaluating diamonds. The ACFEM permits observation using colors corresponding to cathodoluminescence (CL) wavelengths in the visible region (400-700nm) to distinguish the type, size, and distribution of emission centers and emission bands of diamonds. The ACFEM is an effective tool for determing the conditions used for synthesizing chemical vapor deposition (CVD) diamonds, and is far superior to X-PS and SIMS as a tool for analyzing dopants.

Original languageEnglish
Pages (from-to)267-282
Number of pages16
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1990
Externally publishedYes
EventDiamond Optics III - San Diego, CA, USA
Duration: 1990 Jul 91990 Jul 11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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