On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz

A. Orii; M. Suizu; S. Amakawa; K. Katayama; K. Takano; M. Motoyoshi; T. Yoshida; M. Fujishima

doi:10.1109/ICMTS.2013.6528150

On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz

A. Orii, M. Suizu, S. Amakawa, K. Katayama, K. Takano, M. Motoyoshi, T. Yoshida, M. Fujishima

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

20 Citations (Scopus)

Abstract

It is known that the THRU standard (a transmission line) used for thru-reflect-line (TRL) calibration/de-embedding for S-parameter measurement has to be long enough that only a single electromagnetic mode propagates at its center for it to work reliably. But ideally, TRL standards should occupy as little precious silicon real estate as possible. This paper attempts to experimentally find out how long a THRU is long enough above 110GHz up to 170 GHz through measurements of transmission lines of various lengths. The results indicate that the length of a THRU should be at least 400 micrometers, excluding pads and pad-to-line transitions.

Original language	English
Title of host publication	2013 IEEE International Conference on Microelectronic Test Structures, ICMTS 2013 - Conference Proceedings
Pages	81-86
Number of pages	6
DOIs	https://doi.org/10.1109/ICMTS.2013.6528150
Publication status	Published - 2013
Externally published	Yes
Event	2013 International Conference on Microelectronic Test Structures, ICMTS 2013 - Osaka, Japan Duration: 2013 Mar 25 → 2013 Mar 28

Publication series

Name	IEEE International Conference on Microelectronic Test Structures

Other

Other	2013 International Conference on Microelectronic Test Structures, ICMTS 2013
Country/Territory	Japan
City	Osaka
Period	13/3/25 → 13/3/28

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICMTS.2013.6528150

Cite this

Orii, A., Suizu, M., Amakawa, S., Katayama, K., Takano, K., Motoyoshi, M., Yoshida, T., & Fujishima, M. (2013). On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz. In 2013 IEEE International Conference on Microelectronic Test Structures, ICMTS 2013 - Conference Proceedings (pp. 81-86). Article 6528150 (IEEE International Conference on Microelectronic Test Structures). https://doi.org/10.1109/ICMTS.2013.6528150

On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz. / Orii, A.; Suizu, M.; Amakawa, S. et al.
2013 IEEE International Conference on Microelectronic Test Structures, ICMTS 2013 - Conference Proceedings. 2013. p. 81-86 6528150 (IEEE International Conference on Microelectronic Test Structures).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Orii, A, Suizu, M, Amakawa, S, Katayama, K, Takano, K, Motoyoshi, M, Yoshida, T & Fujishima, M 2013, On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz. in 2013 IEEE International Conference on Microelectronic Test Structures, ICMTS 2013 - Conference Proceedings., 6528150, IEEE International Conference on Microelectronic Test Structures, pp. 81-86, 2013 International Conference on Microelectronic Test Structures, ICMTS 2013, Osaka, Japan, 13/3/25. https://doi.org/10.1109/ICMTS.2013.6528150

Orii A, Suizu M, Amakawa S, Katayama K, Takano K, Motoyoshi M et al. On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz. In 2013 IEEE International Conference on Microelectronic Test Structures, ICMTS 2013 - Conference Proceedings. 2013. p. 81-86. 6528150. (IEEE International Conference on Microelectronic Test Structures). doi: 10.1109/ICMTS.2013.6528150

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abstract = "It is known that the THRU standard (a transmission line) used for thru-reflect-line (TRL) calibration/de-embedding for S-parameter measurement has to be long enough that only a single electromagnetic mode propagates at its center for it to work reliably. But ideally, TRL standards should occupy as little precious silicon real estate as possible. This paper attempts to experimentally find out how long a THRU is long enough above 110GHz up to 170 GHz through measurements of transmission lines of various lengths. The results indicate that the length of a THRU should be at least 400 micrometers, excluding pads and pad-to-line transitions.",

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On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz

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