TY - JOUR
T1 - Operation of three-dimensional MEMS mirror by single superposed driving signal
AU - Nagasawa, Toshiya
AU - Oguchi, Yohei
AU - Iwase, Eiji
N1 - Publisher Copyright:
© 2017 The Japan Society of Applied Physics.
PY - 2017/6
Y1 - 2017/6
N2 - We have realized a three-dimensional (3D) operation of a microelectromechanical systems (MEMS) mirror with three resonant modes and a single driving apparatus by a single superposed signal with three frequencies. We fabricated a 3D MEMS mirror with a single pair of beams having three resonant modes (x- and y-axis rotational modes and a z-axis vertical mode). We demonstrated the 3D operation by a single driving apparatus using the Lorentz force. In addition, we have shown that the x- and y-axis rotational angles and z-axis vertical displacement are proportional to the voltage amplitudes of each resonant frequency in the superposed signal, and the proportionality constants for each angle and deformation are approximately determined as 0.10°/V, 0.10°/V, and 70nm/V, respectively. This result indicates that the mechanical amplitude of each mode is easy to control by the signal amplitude of each resonant frequency in the superposed signal.
AB - We have realized a three-dimensional (3D) operation of a microelectromechanical systems (MEMS) mirror with three resonant modes and a single driving apparatus by a single superposed signal with three frequencies. We fabricated a 3D MEMS mirror with a single pair of beams having three resonant modes (x- and y-axis rotational modes and a z-axis vertical mode). We demonstrated the 3D operation by a single driving apparatus using the Lorentz force. In addition, we have shown that the x- and y-axis rotational angles and z-axis vertical displacement are proportional to the voltage amplitudes of each resonant frequency in the superposed signal, and the proportionality constants for each angle and deformation are approximately determined as 0.10°/V, 0.10°/V, and 70nm/V, respectively. This result indicates that the mechanical amplitude of each mode is easy to control by the signal amplitude of each resonant frequency in the superposed signal.
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U2 - 10.7567/JJAP.56.06GN12
DO - 10.7567/JJAP.56.06GN12
M3 - Article
AN - SCOPUS:85020543357
SN - 0021-4922
VL - 56
JO - Japanese journal of applied physics
JF - Japanese journal of applied physics
IS - 6
M1 - 06GN12
ER -