Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips

T. Shimizu; M. Nakada; H. Tsuda; J. Akedo; K. Nishi; K. Ohashi

doi:10.1109/ISAF.2007.4393418

Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips

T. Shimizu^*, M. Nakada, H. Tsuda, J. Akedo, K. Nishi, K. Ohashi

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

We developed a lead zirconate titanate, Pb(Zr,Ti)O₃ (PZT), optical waveguide fabricated using aerosol deposition (AD). The device's optical transmission loss of about 4 dB/mm is comparable with that of AD film. The PZT optical waveguide can meet the requirements of optical modulators for low optical loss.

Original language	English
Title of host publication	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Pages	831-833
Number of pages	3
DOIs	https://doi.org/10.1109/ISAF.2007.4393418
Publication status	Published - 2007 Dec 1
Externally published	Yes
Event	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan Duration: 2007 May 27 → 2007 May 31

Publication series

Name	IEEE International Symposium on Applications of Ferroelectrics

Other

Other	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Country/Territory	Japan
City	Nara-city
Period	07/5/27 → 07/5/31

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/ISAF.2007.4393418

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Shimizu, T., Nakada, M., Tsuda, H., Akedo, J., Nishi, K., & Ohashi, K. (2007). Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (pp. 831-833). [4393418] (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393418

Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips. / Shimizu, T.; Nakada, M.; Tsuda, H. et al.
2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. p. 831-833 4393418 (IEEE International Symposium on Applications of Ferroelectrics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Shimizu, T, Nakada, M, Tsuda, H, Akedo, J, Nishi, K & Ohashi, K 2007, Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips. in 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF., 4393418, IEEE International Symposium on Applications of Ferroelectrics, pp. 831-833, 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF, Nara-city, Japan, 07/5/27. https://doi.org/10.1109/ISAF.2007.4393418

Shimizu T, Nakada M, Tsuda H, Akedo J, Nishi K, Ohashi K. Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. p. 831-833. 4393418. (IEEE International Symposium on Applications of Ferroelectrics). doi: 10.1109/ISAF.2007.4393418

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abstract = "We developed a lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), optical waveguide fabricated using aerosol deposition (AD). The device's optical transmission loss of about 4 dB/mm is comparable with that of AD film. The PZT optical waveguide can meet the requirements of optical modulators for low optical loss.",

author = "T. Shimizu and M. Nakada and H. Tsuda and J. Akedo and K. Nishi and K. Ohashi",

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AU - Nishi, K.

AU - Ohashi, K.

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AB - We developed a lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), optical waveguide fabricated using aerosol deposition (AD). The device's optical transmission loss of about 4 dB/mm is comparable with that of AD film. The PZT optical waveguide can meet the requirements of optical modulators for low optical loss.

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Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips

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