TY - JOUR
T1 - Optical refractive index biosensor using evanescently coupled lateral Bragg gratings on silicon-on-insulator
AU - Mendez Astudillo, Manuel
AU - Takahisa, Hiroki
AU - Okayama, Hideaki
AU - Nakajima, Hirochika
PY - 2016/8/1
Y1 - 2016/8/1
N2 - In this paper, we present a compact silicon-on-insulator optical biosensor based on lateral Bragg gratings evanescently coupled to a waveguide. The device is fabricated by electron-beam lithography and dry-etched in a single step with inductive coupled plasma reactive ion etching (ICP-RIE). Fully etched grating couplers are used to couple the light in and out of the chip, while lateral Bragg gratings are used as the sensing element of the device. A sensitivity of 22 nm/RIU is obtained by exposing the device to deionized water with different NaCl concentrations with a footprint area of 15 ' 4m2 that allows for densely multiplexed solutions.
AB - In this paper, we present a compact silicon-on-insulator optical biosensor based on lateral Bragg gratings evanescently coupled to a waveguide. The device is fabricated by electron-beam lithography and dry-etched in a single step with inductive coupled plasma reactive ion etching (ICP-RIE). Fully etched grating couplers are used to couple the light in and out of the chip, while lateral Bragg gratings are used as the sensing element of the device. A sensitivity of 22 nm/RIU is obtained by exposing the device to deionized water with different NaCl concentrations with a footprint area of 15 ' 4m2 that allows for densely multiplexed solutions.
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U2 - 10.7567/JJAP.55.08RE09
DO - 10.7567/JJAP.55.08RE09
M3 - Article
AN - SCOPUS:84989360936
SN - 0021-4922
VL - 55
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 8
M1 - 08RE09
ER -