Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

Jing Ji; Hiroshi Oigawa; Hsin Hui Chen; Meng Zhao; Toshitsugu Ueda

doi:10.1541/ieejsms.132.275

Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

Jing Ji^*, Hiroshi Oigawa, Hsin Hui Chen, Meng Zhao, Toshitsugu Ueda

^*Corresponding author for this work

Information, Production and Systems Research Center

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved.

Original language	English
Pages (from-to)	275-281
Number of pages	7
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	132
Issue number	9
DOIs	https://doi.org/10.1541/ieejsms.132.275
Publication status	Published - 2012

Keywords

Electrode
Finite element method
Optimization

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering

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10.1541/ieejsms.132.275

Cite this

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abstract = "For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved.",

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T1 - Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

AU - Ji, Jing

AU - Oigawa, Hiroshi

AU - Chen, Hsin Hui

AU - Zhao, Meng

AU - Ueda, Toshitsugu

PY - 2012

Y1 - 2012

N2 - For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved.

AB - For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved.

KW - Electrode

KW - Finite element method

KW - Optimization

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JF - IEEJ Transactions on Sensors and Micromachines

IS - 9

ER -

Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

Abstract

Keywords

ASJC Scopus subject areas

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