TY - GEN
T1 - Optimization of high average power FEL beam for EUV lithography application
AU - Endo, A.
AU - Sakaue, K.
AU - Washio, M.
AU - Mizoguchi, H.
N1 - Publisher Copyright:
Copyright © 2014 CC-BY-3.0 and by the respective authors.
PY - 2014
Y1 - 2014
N2 - EUV source community is interested in evaluating an alternative method based on high repetition rate FEL, to avoid a risk of the potential source power limit by the plasma based technology. Present SASE FEL pulse (typically 0.1mJ, 100fs, 1 mm diameter) has higher beam fluence than the resist ablation threshold, and high spatial coherence which results in speckle and interference patterns, and random longitudinal mode spikes of high peak power micro pulses, which is not favourable to resist chemistry. This paper discusses on the required technological assessment and lowest risk approach to construct a prototype, based on superconducting linac and cryogenic undulator, to demonstrate a MHz repetition rate, high average power 13.5nm FEL equipped with specified optical components, for best optimization in EUVL application, including a scaling to 6.7nm wavelength region.
AB - EUV source community is interested in evaluating an alternative method based on high repetition rate FEL, to avoid a risk of the potential source power limit by the plasma based technology. Present SASE FEL pulse (typically 0.1mJ, 100fs, 1 mm diameter) has higher beam fluence than the resist ablation threshold, and high spatial coherence which results in speckle and interference patterns, and random longitudinal mode spikes of high peak power micro pulses, which is not favourable to resist chemistry. This paper discusses on the required technological assessment and lowest risk approach to construct a prototype, based on superconducting linac and cryogenic undulator, to demonstrate a MHz repetition rate, high average power 13.5nm FEL equipped with specified optical components, for best optimization in EUVL application, including a scaling to 6.7nm wavelength region.
UR - http://www.scopus.com/inward/record.url?scp=84999810193&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84999810193&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84999810193
T3 - Proceedings of the 36th International Free Electron Laser Conference, FEL 2014
SP - 990
EP - 992
BT - Proceedings of the 36th International Free Electron Laser Conference, FEL 2014
PB - Joint Accelerator Conferences Website (JACoW)
T2 - 36th International Free Electron Laser Conference, FEL 2014
Y2 - 25 August 2014 through 29 August 2014
ER -