Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity

Siim Heinsalu, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we show the optimization procedure and experimental results for suspended ladder Bragg grating on silicon on insulator platform for both wavelength sensitivity and amplitude sensitivity. As results, by optimizing the structures for high wavelength sensitivity 1100 nm/RIU by simulation and 865 nm/RIU by experiment with sensor lengths of about 10 m were obtained. On the other hand, for high amplitude sensitivity, 51.3 dB with medium 0.01 RIU change by simulation and 24.5 dB with medium 0.004 RIU change by experiment with sensor lengths of 32.2 m and 38 m respectively.

Original languageEnglish
Title of host publication2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728195018
DOIs
Publication statusPublished - 2021
Event20th IEEE Sensors, SENSORS 2021 - Virtual, Online, Australia
Duration: 2021 Oct 312021 Nov 4

Publication series

NameProceedings of IEEE Sensors
Volume2021-October
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference20th IEEE Sensors, SENSORS 2021
Country/TerritoryAustralia
CityVirtual, Online
Period21/10/3121/11/4

Keywords

  • Bragg gratings
  • optical sensors
  • optimization for high sensitivity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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