Oriented film growth of Ba_1-xSr_xTiO₃ dielectrics on glass substrates using 2D nanosheet seed layer

An approach to fabricate Ba_0.5Sr_0.5TiO₃ (BST) films with a preferred orientation on a glass substrate by pulsed laser deposition was developed. To ensure a preferred crystallographic orientation, we utilized a molecularly thin Ca₂Nb₃O ₁₀perovskite nanosheet as a seed layer and successfully fabricated BST films with a nearly perfect (100)-axis orientation. The 100 nm films after annealing at 450 C in air showed a good dielectric performance (ε_r > 400), which was comparable to the ε_r value of epitaxially grown films with the same thickness. These results indicate that the nanosheet seed layer plays a crucial role in controlled film growth, realizing a nearly intrinsic performance of BST.