Fingerprint
Dive into the research topics of 'Oxidation on poly silicon at low temperature using UV light-excited ozone gas'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Oxidation on poly silicon at low temperature using UV light-excited ozone gas
Naoto Kameda*, Tetsuya Nishiguchi, Yoshiki Morikawa, Mitsuru Kekura, Hidehiko Nonaka, Shingo Ichimura
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
3
Citations
(Scopus)