Oxidation on poly silicon at low temperature using UV light-excited ozone gas

Naoto Kameda*, Tetsuya Nishiguchi, Yoshiki Morikawa, Mitsuru Kekura, Hidehiko Nonaka, Shingo Ichimura

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Keyphrases

Engineering

Material Science

Physics