Abstract
We have developed high-sensitivity in-situ measurement technology based on photons with visible to ultraviolet wavelength bands. This measurement technology builds on plasmatizing particles technology and a high-sensitivity measurement technology for measuring photons from the plasma. Thus, we have established a technology for measuring particle sizes and the constituent element content of particles with 10% accuracy.
Original language | English |
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Journal | IEEJ Transactions on Sensors and Micromachines |
Volume | 127 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2007 |
Keywords
- Laser break down
- LIBS
- Particle measurement technology
- Time measurement
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering