Peristaltic micropump fabricated by depositing parylene directly on liquid

Satoshi Komatsu; Nguyen Binh-Khiem; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/SENSOR.2009.5285656

Peristaltic micropump fabricated by depositing parylene directly on liquid

Satoshi Komatsu^*, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We fabricated a peristaltic micropump by depositing Parylene on liquid directly (PoLD method), and tested its pumping characteristics. The Parylene thin film deposited on liquid not only forms the membrane of the micropump, but also composes the whole structure of the microfluidic system. The pumping membrane can be deformed by electrostatic force. This deformation can create liquid flow. Our micropump can transfer liquid at the flow rate of 2.7μl/min and generate a differential pressure of 41Pa. On the other hand, this pump made a wrinkle when the voltage applied and it leaked liquid. We devised the shape of the channel and electrodes and enabled it to close tightly.

Original language	English
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	2007-2010
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2009.5285656
Publication status	Published - 2009
Externally published	Yes
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: 2009 Jun 21 → 2009 Jun 25

Publication series

Name	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country/Territory	United States
City	Denver, CO
Period	09/6/21 → 09/6/25

Keywords

Microfluidic system
Parylene
Peristaltic pump

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2009.5285656

Cite this

Komatsu, S., Binh-Khiem, N., Iwase, E., Matsumoto, K., & Shimoyama, I. (2009). Peristaltic micropump fabricated by depositing parylene directly on liquid. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2007-2010). Article 5285656 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285656

Peristaltic micropump fabricated by depositing parylene directly on liquid. / Komatsu, Satoshi; Binh-Khiem, Nguyen; Iwase, Eiji et al.
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2007-2010 5285656 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Komatsu, S, Binh-Khiem, N, Iwase, E, Matsumoto, K & Shimoyama, I 2009, Peristaltic micropump fabricated by depositing parylene directly on liquid. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285656, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 2007-2010, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285656

Komatsu S, Binh-Khiem N, Iwase E, Matsumoto K, Shimoyama I. Peristaltic micropump fabricated by depositing parylene directly on liquid. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2007-2010. 5285656. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2009.5285656

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title = "Peristaltic micropump fabricated by depositing parylene directly on liquid",

abstract = "We fabricated a peristaltic micropump by depositing Parylene on liquid directly (PoLD method), and tested its pumping characteristics. The Parylene thin film deposited on liquid not only forms the membrane of the micropump, but also composes the whole structure of the microfluidic system. The pumping membrane can be deformed by electrostatic force. This deformation can create liquid flow. Our micropump can transfer liquid at the flow rate of 2.7μl/min and generate a differential pressure of 41Pa. On the other hand, this pump made a wrinkle when the voltage applied and it leaked liquid. We devised the shape of the channel and electrodes and enabled it to close tightly.",

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author = "Satoshi Komatsu and Nguyen Binh-Khiem and Eiji Iwase and Kiyoshi Matsumoto and Isao Shimoyama",

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AU - Komatsu, Satoshi

AU - Binh-Khiem, Nguyen

AU - Iwase, Eiji

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2009

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N2 - We fabricated a peristaltic micropump by depositing Parylene on liquid directly (PoLD method), and tested its pumping characteristics. The Parylene thin film deposited on liquid not only forms the membrane of the micropump, but also composes the whole structure of the microfluidic system. The pumping membrane can be deformed by electrostatic force. This deformation can create liquid flow. Our micropump can transfer liquid at the flow rate of 2.7μl/min and generate a differential pressure of 41Pa. On the other hand, this pump made a wrinkle when the voltage applied and it leaked liquid. We devised the shape of the channel and electrodes and enabled it to close tightly.

AB - We fabricated a peristaltic micropump by depositing Parylene on liquid directly (PoLD method), and tested its pumping characteristics. The Parylene thin film deposited on liquid not only forms the membrane of the micropump, but also composes the whole structure of the microfluidic system. The pumping membrane can be deformed by electrostatic force. This deformation can create liquid flow. Our micropump can transfer liquid at the flow rate of 2.7μl/min and generate a differential pressure of 41Pa. On the other hand, this pump made a wrinkle when the voltage applied and it leaked liquid. We devised the shape of the channel and electrodes and enabled it to close tightly.

KW - Microfluidic system

KW - Parylene

KW - Peristaltic pump

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ER -

Peristaltic micropump fabricated by depositing parylene directly on liquid

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Keywords

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