Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy

Uijin Jung; Kenta Kuwana; Hidetoshi Takahashi; Tetsuo Kan; Yusuke Takei; Kentaro Noda; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2010.5442435

Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy

Uijin Jung^*, Kenta Kuwana, Hidetoshi Takahashi, Tetsuo Kan, Yusuke Takei, Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photo-response was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.

Original language	English
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	588-591
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442435
Publication status	Published - 2010 Jun 1
Externally published	Yes
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: 2010 Jan 24 → 2010 Jan 28

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	10/1/24 → 10/1/28

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2010.5442435

Cite this

Jung, U., Kuwana, K., Takahashi, H., Kan, T., Takei, Y., Noda, K., Iwase, E., Matsumoto, K., & Shimoyama, I. (2010). Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 588-591). Article 5442435 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442435

Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy. / Jung, Uijin; Kuwana, Kenta; Takahashi, Hidetoshi et al.
MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 588-591 5442435 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Jung, U, Kuwana, K, Takahashi, H, Kan, T, Takei, Y, Noda, K, Iwase, E, Matsumoto, K & Shimoyama, I 2010, Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442435, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 588-591, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 10/1/24. https://doi.org/10.1109/MEMSYS.2010.5442435

Jung U, Kuwana K, Takahashi H, Kan T, Takei Y, Noda K et al. Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 588-591. 5442435. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2010.5442435

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abstract = "This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photo-response was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.",

author = "Uijin Jung and Kenta Kuwana and Hidetoshi Takahashi and Tetsuo Kan and Yusuke Takei and Kentaro Noda and Eiji Iwase and Kiyoshi Matsumoto and Isao Shimoyama",

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AU - Takahashi, Hidetoshi

AU - Kan, Tetsuo

AU - Takei, Yusuke

AU - Noda, Kentaro

AU - Iwase, Eiji

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

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AB - This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photo-response was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.

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Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy

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