TY - JOUR
T1 - Photochemical reaction of ozone and 1,1,1,3,3,3-hexamethyldisilazane
T2 - Analysis of the gas reaction between precursors in a photochemical vapor deposition process
AU - Nakamura, Ken
AU - Nonaka, Hidehiko
AU - Kameda, Naoto
AU - Nishiguchi, Tetsuya
AU - Ichimura, Shingo
PY - 2008/9/12
Y1 - 2008/9/12
N2 - The photochemical reaction of 1,1,1,3,3,3-hexamethyldisilazane (HMDS) and ozone (O3) in the gas phase was analyzed as the side reaction in the photochemical vapor deposition (photo-CVD) process irradiated by ultraviolet light: the analysis was conducted by Fourier-transform infrared absorption spectroscopy (FT-IR) and mass spectrometry (MS). The final products of this photochemical reaction between HMDS and O3 are CO2, N 2, and H2O, although this reaction is initiated at the Si-N-Si bond of HMDS with O3 and ultraviolet (UV) light, thus producing, as a reaction intermediate, a compound with carbonyl and/or carboxylic group followed by Si-N-Si scission.
AB - The photochemical reaction of 1,1,1,3,3,3-hexamethyldisilazane (HMDS) and ozone (O3) in the gas phase was analyzed as the side reaction in the photochemical vapor deposition (photo-CVD) process irradiated by ultraviolet light: the analysis was conducted by Fourier-transform infrared absorption spectroscopy (FT-IR) and mass spectrometry (MS). The final products of this photochemical reaction between HMDS and O3 are CO2, N 2, and H2O, although this reaction is initiated at the Si-N-Si bond of HMDS with O3 and ultraviolet (UV) light, thus producing, as a reaction intermediate, a compound with carbonyl and/or carboxylic group followed by Si-N-Si scission.
KW - CVD
KW - HMDS
KW - Infrared absorption
KW - Mass spectrometry
KW - Organosilane
KW - Oxide
KW - Ozone
KW - Photodissociation
KW - Photoreaction
KW - SiO
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U2 - 10.1143/JJAP.47.7349
DO - 10.1143/JJAP.47.7349
M3 - Article
AN - SCOPUS:55149110932
SN - 0021-4922
VL - 47
SP - 7349
EP - 7355
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 9 PART 1
ER -