Picosecond electron-beam and synchrotron radiation pulse radiolysis for studies on electron-beam and x-ray resists

Yoichi Yoshida; Hiromi Shibata; Seiichi Tagawa; Masakazu Washio; Yoneho Tabata; Noriyuki Kouchi; Atsushi Ogata

doi:10.1117/12.953039

Picosecond electron-beam and synchrotron radiation pulse radiolysis for studies on electron-beam and x-ray resists

Yoichi Yoshida, Hiromi Shibata, Seiichi Tagawa, Masakazu Washio, Yoneho Tabata, Noriyuki Kouchi, Atsushi Ogata

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Picosecond electron-beam and synchrotron radiation pulse radiolysis are powerful method to study the reaction mechanism in irradiated electron beam and X-ray resists. The primary processes can be detected spectroscopically by using both pulse radiolysis systems. The details of the pulse radiolysis systems and a typical exsample of pulse radiolysis studies on the resists are introduced.

Original language	English
Pages (from-to)	274-281
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1086
DOIs	https://doi.org/10.1117/12.953039
Publication status	Published - 1989 Aug 22
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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abstract = "Picosecond electron-beam and synchrotron radiation pulse radiolysis are powerful method to study the reaction mechanism in irradiated electron beam and X-ray resists. The primary processes can be detected spectroscopically by using both pulse radiolysis systems. The details of the pulse radiolysis systems and a typical exsample of pulse radiolysis studies on the resists are introduced.",

author = "Yoichi Yoshida and Hiromi Shibata and Seiichi Tagawa and Masakazu Washio and Yoneho Tabata and Noriyuki Kouchi and Atsushi Ogata",

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T1 - Picosecond electron-beam and synchrotron radiation pulse radiolysis for studies on electron-beam and x-ray resists

AU - Yoshida, Yoichi

AU - Shibata, Hiromi

AU - Tagawa, Seiichi

AU - Washio, Masakazu

AU - Tabata, Yoneho

AU - Kouchi, Noriyuki

AU - Ogata, Atsushi

PY - 1989/8/22

Y1 - 1989/8/22

N2 - Picosecond electron-beam and synchrotron radiation pulse radiolysis are powerful method to study the reaction mechanism in irradiated electron beam and X-ray resists. The primary processes can be detected spectroscopically by using both pulse radiolysis systems. The details of the pulse radiolysis systems and a typical exsample of pulse radiolysis studies on the resists are introduced.

AB - Picosecond electron-beam and synchrotron radiation pulse radiolysis are powerful method to study the reaction mechanism in irradiated electron beam and X-ray resists. The primary processes can be detected spectroscopically by using both pulse radiolysis systems. The details of the pulse radiolysis systems and a typical exsample of pulse radiolysis studies on the resists are introduced.

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Picosecond electron-beam and synchrotron radiation pulse radiolysis for studies on electron-beam and x-ray resists

Abstract

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