Piezoelectrically operated actuators by quartz micromachining for optical application

Hiroshi Toshiyoshi*, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)


We report the new type of a monolithic quartz actuator which is fabricated by anisotropic etching and operated through piezoelectric effect at resonant frequency. The quartz actuators with large displacement have no been developed because quartz has small piezoelectric constants compared to other materials such as PZT. However, we proved that a smart mechanism enabled us to have a large displacement up to 200 microns with a millimeter size suspended actuator using the piezoelectricity of quartz. As examples, we fabricated bellows type actuators and optical choppers, and measured their mechanical characteristics. We also showed that the bellows type actuator could displace a small object statically by hitting it repeatedly. This woodpecker motion can be applied to move the small optical component such as a mirror and prism to switch the path of light.

Original languageEnglish
Title of host publicationIEEE Micro Electro Mechanical Systems
Place of PublicationPiscataway, NJ, United States
PublisherPubl by IEEE
Number of pages6
ISBN (Print)0780309588
Publication statusPublished - 1993
Externally publishedYes
EventProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS - Fort Lauderdale, FL, USA
Duration: 1993 Feb 71993 Feb 10


OtherProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS
CityFort Lauderdale, FL, USA

ASJC Scopus subject areas

  • General Engineering


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