Polarization charge densities at p-GaN/n-AlGaN heterojunctions evaluated by capacitance-voltage characteristics

T. Makimoto*, K. Kumakura, N. Kobayashi

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)


We propose a new method to evaluate the polarization charge density induced at hetero-interfaces using capacitance-voltage characteristics of p-n heterojunctions and have applied this method to p-GaN/n-AlGaN heterojunction diodes. This method uses p-n heterojunction structures instead of undoped ones, so the obtained result is less influenced by background impurities or deep levels. Furthermore, it is possible to evaluate the negative polarization charge densities for GaN on top of AlGaN heterostructures. The experimental results indicate that the negative polarization charges with their densities more than 5 × 1012 cm-2 are induced at the GaN/AlGaN hetero-interfaces for the Al mole fractions above 11%.

Original languageEnglish
Pages (from-to)334-337
Number of pages4
JournalPhysica Status Solidi C: Conferences
Issue number1
Publication statusPublished - 2002 Dec 1
Externally publishedYes
Event2nd International Workshop on Nitride Semiconductors, IWN 2002 - Aachen, Germany
Duration: 2002 Jul 222002 Jul 25

ASJC Scopus subject areas

  • Condensed Matter Physics


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