TY - GEN
T1 - Polarization inverted (0001) / (000-1) ScAIN film resonators operating in second overtone mode
AU - Suzuki, Masashi
AU - Yanagitani, Takahiko
AU - Odagawa, Hiroyuki
PY - 2012
Y1 - 2012
N2 - Polarization-inverted multilayered structure can excite high overtone mode resonance. Resonant frequency of high order mode resonator is higher than that of 1st mode resonator even though entire film thickness is same. The film thickness of high order mode resonator is thicker in same operating frequency. Therefore, high order mode resonator is expected to have high power handling capability. Polarization are controlled by bottom surface properties in epitaxial films, but polarization inverted multilayer structure can not be fabricated. We obtained polarization inversion in ScAlN film by Al target sputtering with small amount of Al2O3 ingot. Thickness extensional mode electromechanical coupling coefficient kt of the ScAlN film was estimated to be 0.21. Two layered polarization inverted ScAlN film resonator was prepared in this deposition process. Suppression of 1st mode resonance and excitation of 2nd overtone mode resonance were observed.
AB - Polarization-inverted multilayered structure can excite high overtone mode resonance. Resonant frequency of high order mode resonator is higher than that of 1st mode resonator even though entire film thickness is same. The film thickness of high order mode resonator is thicker in same operating frequency. Therefore, high order mode resonator is expected to have high power handling capability. Polarization are controlled by bottom surface properties in epitaxial films, but polarization inverted multilayer structure can not be fabricated. We obtained polarization inversion in ScAlN film by Al target sputtering with small amount of Al2O3 ingot. Thickness extensional mode electromechanical coupling coefficient kt of the ScAlN film was estimated to be 0.21. Two layered polarization inverted ScAlN film resonator was prepared in this deposition process. Suppression of 1st mode resonance and excitation of 2nd overtone mode resonance were observed.
KW - High overtone mode resonance
KW - Ion beam irradiation
KW - Polarization-inverted multi-layred films
KW - ScAIN
UR - http://www.scopus.com/inward/record.url?scp=84882444251&partnerID=8YFLogxK
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U2 - 10.1109/ULTSYM.2012.0482
DO - 10.1109/ULTSYM.2012.0482
M3 - Conference contribution
AN - SCOPUS:84882444251
SN - 9781467345613
T3 - IEEE International Ultrasonics Symposium, IUS
BT - 2012 IEEE International Ultrasonics Symposium, IUS 2012
T2 - 2012 IEEE International Ultrasonics Symposium, IUS 2012
Y2 - 7 October 2012 through 10 October 2012
ER -