Abstract
The pressure dependent rate constant for the reaction, SiH4(g)→SiH3(g)+H was predicted using the Rice-Ramspger-Kassel-Marcus theory aided by Ab-initio molecular orbital (MO). It was calculated under conditions in which the temperatures were from 600 to 1500 K intervals of 100 K. The Arrhenius type rate expression was shown.
Original language | English |
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Pages (from-to) | 520-526 |
Number of pages | 7 |
Journal | Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals |
Volume | 63 |
Issue number | 4 |
Publication status | Published - 1999 |
ASJC Scopus subject areas
- Metals and Alloys