Preliminary Pressure Measurement in the Range of 10-9 Pa Using a Picosecond Pulsed Laser

Kiyohide Kokubun; Sigeyuki Sekine; Shingo Ichimura; Hazime Shimizu

doi:10.1143/JJAP.32.L1368

Preliminary Pressure Measurement in the Range of 10-9 Pa Using a Picosecond Pulsed Laser

Kiyohide Kokubun, Sigeyuki Sekine, Shingo Ichimura, Hazime Shimizu

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Results of the preliminary pressure measurement using a picosecond pulsed YAG laser are presented. By this method, pressures in the range of 10-9 Pa were measured for H2 gas. Advantages of this method and the problem of noise are discussed compared with the method using an excimer laser.

Original language	English
Pages (from-to)	L1368-L1369
Journal	Japanese journal of applied physics
Volume	32
Issue number	9
DOIs	https://doi.org/10.1143/JJAP.32.L1368
Publication status	Published - 1993 Sept
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.32.L1368

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title = "Preliminary Pressure Measurement in the Range of 10-9 Pa Using a Picosecond Pulsed Laser",

abstract = "Results of the preliminary pressure measurement using a picosecond pulsed YAG laser are presented. By this method, pressures in the range of 10-9 Pa were measured for H2 gas. Advantages of this method and the problem of noise are discussed compared with the method using an excimer laser.",

author = "Kiyohide Kokubun and Sigeyuki Sekine and Shingo Ichimura and Hazime Shimizu",

year = "1993",

month = sep,

doi = "10.1143/JJAP.32.L1368",

language = "English",

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pages = "L1368--L1369",

journal = "Japanese journal of applied physics",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

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T1 - Preliminary Pressure Measurement in the Range of 10-9 Pa Using a Picosecond Pulsed Laser

AU - Kokubun, Kiyohide

AU - Sekine, Sigeyuki

AU - Ichimura, Shingo

AU - Shimizu, Hazime

PY - 1993/9

Y1 - 1993/9

N2 - Results of the preliminary pressure measurement using a picosecond pulsed YAG laser are presented. By this method, pressures in the range of 10-9 Pa were measured for H2 gas. Advantages of this method and the problem of noise are discussed compared with the method using an excimer laser.

AB - Results of the preliminary pressure measurement using a picosecond pulsed YAG laser are presented. By this method, pressures in the range of 10-9 Pa were measured for H2 gas. Advantages of this method and the problem of noise are discussed compared with the method using an excimer laser.

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JO - Japanese journal of applied physics

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ER -

Preliminary Pressure Measurement in the Range of 10-9 Pa Using a Picosecond Pulsed Laser

Abstract

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