Preparation of oxide superconducting films in MBE using NO2 and O3 gases

T. Shimizu*, H. Nonaka, S. Hosokawa, S. Ichimura, K. Arai

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Thin films of YBa2Cu3O7-δ (YBCO) were prepared in MBE with two types of oxidizing gases. One is a NO2 supersonic molecular beam which is well collimated NO2 beam with a high flux density. The other is a high purity ozone gas with good controllability in flux density. Using RHEED during deposition we observed growth behaviors of YBCO with each oxidizing gas. The RHEED intensity oscillations under coevaporation conditions suggest unit by unit growth of YBCO. The overall RHEED oscillation with period of c-axis unit was observed during sequential deposition with O3.

Original languageEnglish
Pages (from-to)2003-2004
Number of pages2
JournalPhysica C: Superconductivity and its applications
Issue numberPART 3
Publication statusPublished - 1991 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering


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