Pressure Measurement by Photoelectron Counting

Shigeyuki Sekine, Kiyohide Kokubun, Shingo Ichimura, Hazime Shimizu

Research output: Contribution to journalArticlepeer-review


The measurement of gas pressure in ultrahigh vacuum was carried out by detecting laser-generated photoelectrons. Xenon atoms filling a vacuum chamber were nonresonantly ionized by a picosecond laser pulse. The laser intensity dependence of the number of ions produced was measured, and almost all xenon atoms in a focal area were found to be ionized. The number of photoelectrons produced was also measured as a function of xenon pressure. The signal intensity was proportional to xenon pressure in the range from 10-2 to 10-7 Pa.

Original languageEnglish
Pages (from-to)714-717
Number of pages4
JournalShinku/Journal of the Vacuum Society of Japan
Issue number9
Publication statusPublished - 1994
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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