Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser

Kiyohide Kokubun; Shigeyuki Sekine; Shingo Ichimura; Akira Kurokawa; Hazime Shimizu

doi:10.3131/jvsj.37.711

Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser

Kiyohide Kokubun, Shigeyuki Sekine, Shingo Ichimura, Akira Kurokawa, Hazime Shimizu

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H₂, CO and CO₂ gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.

Original language	English
Pages (from-to)	711-713
Number of pages	3
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	37
Issue number	9
DOIs	https://doi.org/10.3131/jvsj.37.711
Publication status	Published - 1994
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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title = "Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser",

abstract = "By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H2, CO and CO2 gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.",

author = "Kiyohide Kokubun and Shigeyuki Sekine and Shingo Ichimura and Akira Kurokawa and Hazime Shimizu",

year = "1994",

doi = "10.3131/jvsj.37.711",

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AU - Kokubun, Kiyohide

AU - Sekine, Shigeyuki

AU - Ichimura, Shingo

AU - Kurokawa, Akira

AU - Shimizu, Hazime

PY - 1994

Y1 - 1994

N2 - By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H2, CO and CO2 gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.

AB - By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H2, CO and CO2 gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.

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Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser

Abstract

ASJC Scopus subject areas

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