Pressure measurement of 10-10 to 10-12 Pa by nonresonant multiphoton ionization

K. Kokubun; S. Sekine; S. Ichimura; A. Kurokawa; H. Shimizu

doi:10.1016/0042-207x(96)00019-x

Pressure measurement of 10^-10 to 10^-12 Pa by nonresonant multiphoton ionization

K. Kokubun^*, S. Sekine, S. Ichimura, A. Kurokawa, H. Shimizu

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

In order to increase the ion-detection efficiency of the pressure measurement method using nonresonant multiphoton ionization, an ion-detection head was improved. Using this head, pressure measurements were carried out for H₂ and Xe in the extreme high vacuum region. As a result, for H₂, by optimizing an incident ion energy, the efficiency increased by a factor of about 2.5. For Xe, without optimizing the incident ion energy, it increased by a factor of about 1.5.

Original language	English
Pages (from-to)	557-559
Number of pages	3
Journal	Vacuum
Volume	47
Issue number	6-8
DOIs	https://doi.org/10.1016/0042-207x(96)00019-x
Publication status	Published - 1996
Externally published	Yes

Keywords

Extreme high vacuum
H
Ion-detection efficiency
Nonresonant multiphoton ionization
Pressure measurement
Xe

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

Access to Document

10.1016/0042-207x(96)00019-x

Cite this

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title = "Pressure measurement of 10-10 to 10-12 Pa by nonresonant multiphoton ionization",

abstract = "In order to increase the ion-detection efficiency of the pressure measurement method using nonresonant multiphoton ionization, an ion-detection head was improved. Using this head, pressure measurements were carried out for H2 and Xe in the extreme high vacuum region. As a result, for H2, by optimizing an incident ion energy, the efficiency increased by a factor of about 2.5. For Xe, without optimizing the incident ion energy, it increased by a factor of about 1.5.",

keywords = "Extreme high vacuum, H, Ion-detection efficiency, Nonresonant multiphoton ionization, Pressure measurement, Xe",

author = "K. Kokubun and S. Sekine and S. Ichimura and A. Kurokawa and H. Shimizu",

year = "1996",

doi = "10.1016/0042-207x(96)00019-x",

language = "English",

volume = "47",

pages = "557--559",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Limited",

number = "6-8",

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TY - JOUR

T1 - Pressure measurement of 10-10 to 10-12 Pa by nonresonant multiphoton ionization

AU - Kokubun, K.

AU - Sekine, S.

AU - Ichimura, S.

AU - Kurokawa, A.

AU - Shimizu, H.

PY - 1996

Y1 - 1996

N2 - In order to increase the ion-detection efficiency of the pressure measurement method using nonresonant multiphoton ionization, an ion-detection head was improved. Using this head, pressure measurements were carried out for H2 and Xe in the extreme high vacuum region. As a result, for H2, by optimizing an incident ion energy, the efficiency increased by a factor of about 2.5. For Xe, without optimizing the incident ion energy, it increased by a factor of about 1.5.

AB - In order to increase the ion-detection efficiency of the pressure measurement method using nonresonant multiphoton ionization, an ion-detection head was improved. Using this head, pressure measurements were carried out for H2 and Xe in the extreme high vacuum region. As a result, for H2, by optimizing an incident ion energy, the efficiency increased by a factor of about 2.5. For Xe, without optimizing the incident ion energy, it increased by a factor of about 1.5.

KW - Extreme high vacuum

KW - H

KW - Ion-detection efficiency

KW - Nonresonant multiphoton ionization

KW - Pressure measurement

KW - Xe

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DO - 10.1016/0042-207x(96)00019-x

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SN - 0042-207X

VL - 47

SP - 557

EP - 559

JO - Vacuum

JF - Vacuum

IS - 6-8

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