TY - JOUR
T1 - Propagation characteristics of shear horizontal surface acoustic waves in (112̄0) ZnO film/silica glass substrate structures
AU - Tanaka, Atsushi
AU - Yanagitani, Takahiko
AU - Matsukawa, Mami
AU - Watanabe, Yoshiaki
PY - 2008/12
Y1 - 2008/12
N2 - This paper presents the propagation characteristics of the shear horizontal surface acoustic wave (SH-SAW) in ZnO (0°, 90°, ψ) (11 2̄ 0) textured ZnO films. ZnO (0°, 90°, 0°) film/interdigital transducer (IDT) electrode/silica glass substrate structures were fabricated by RF magnetron sputtering. Experimental results demonstrate that SH-SAW was clearly excited in these structures. We also theoretically estimated the electromechanical coupling coefficient K2 in the ZnO (0°, 90°, ψ) film/silica glass substrate structure. The theoretical results show that the IDT electrode/ZnO (0°, 90°, 55°) film/silica glass substrate structure had a relatively high K2 value of 3.4%. Moreover, the shear horizontal displacement component of the SH-SAW in this structure is much larger than the transverse and longitudinal displacement components. This structure could be used in SH-SAW sensors for evaluating the electrical properties of liquids.
AB - This paper presents the propagation characteristics of the shear horizontal surface acoustic wave (SH-SAW) in ZnO (0°, 90°, ψ) (11 2̄ 0) textured ZnO films. ZnO (0°, 90°, 0°) film/interdigital transducer (IDT) electrode/silica glass substrate structures were fabricated by RF magnetron sputtering. Experimental results demonstrate that SH-SAW was clearly excited in these structures. We also theoretically estimated the electromechanical coupling coefficient K2 in the ZnO (0°, 90°, ψ) film/silica glass substrate structure. The theoretical results show that the IDT electrode/ZnO (0°, 90°, 55°) film/silica glass substrate structure had a relatively high K2 value of 3.4%. Moreover, the shear horizontal displacement component of the SH-SAW in this structure is much larger than the transverse and longitudinal displacement components. This structure could be used in SH-SAW sensors for evaluating the electrical properties of liquids.
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U2 - 10.1109/TUFFC.2008.986
DO - 10.1109/TUFFC.2008.986
M3 - Article
C2 - 19126495
AN - SCOPUS:68149176905
SN - 0885-3010
VL - 55
SP - 2709
EP - 2713
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
IS - 12
ER -