TY - JOUR
T1 - Propagation properties of leaky surface acoustic wave on water-loaded LiTaO3/quartz bonded structure
AU - Kakio, Shoji
AU - Kato, Yoshiki
AU - Suenaga, Ryota
AU - Suzuki, Masashi
AU - Tezuka, Ami
AU - Kuwae, Hiroyuki
AU - Yokota, Hiroaki
AU - Yonai, Toshifumi
AU - Kishida, Kazuhito
AU - Mizuno, Jun
N1 - Funding Information:
The authors thank Professor J. Kushibiki, Dr. M. Arakawa, and Dr. Y. Ohashi of Tohoku University for their kind instructions on the use of the LFB-UMC system. This work was partially supported by JSPS Grant-in-Aid for Scientific Research (B) no. 17H03233.
Publisher Copyright:
© 2020 The Japan Society of Applied Physics.
PY - 2020/7/1
Y1 - 2020/7/1
N2 - Recently, bonded structures such as LiTaO3/quartz structures have been attracting attention as a means of obtaining high-performance surface acoustic wave (SAW) devices. To investigate the possibility of evaluating the acoustical loss in such bonded structures by subtracting the calculated leakage loss into the water from the measured normalized attenuation factor, propagation properties such as the velocity and normalized attenuation factor of leaky SAWs on a water-loaded 36°YX-LiTaO3/AT0°X-quartz bonded structure were investigated using a line-focus-beam ultrasonic material characterization system and were found to be in good agreement with the calculated values for both the 0°X and 90°X propagation directions.
AB - Recently, bonded structures such as LiTaO3/quartz structures have been attracting attention as a means of obtaining high-performance surface acoustic wave (SAW) devices. To investigate the possibility of evaluating the acoustical loss in such bonded structures by subtracting the calculated leakage loss into the water from the measured normalized attenuation factor, propagation properties such as the velocity and normalized attenuation factor of leaky SAWs on a water-loaded 36°YX-LiTaO3/AT0°X-quartz bonded structure were investigated using a line-focus-beam ultrasonic material characterization system and were found to be in good agreement with the calculated values for both the 0°X and 90°X propagation directions.
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U2 - 10.35848/1347-4065/ab85ac
DO - 10.35848/1347-4065/ab85ac
M3 - Article
AN - SCOPUS:85084182368
SN - 0021-4922
VL - 59
JO - Japanese journal of applied physics
JF - Japanese journal of applied physics
IS - SK
M1 - SKKC04
ER -