Prototype of the multi-pixel X-ray microcalorimeter

H. Kudo; T. Nakamura; T. Arakawa; S. Ohtsuka; T. Izumi; S. Shoji; H. Sato; H. Kobayashi; K. Mori; T. Homma; T. Osaka; K. Mitsuda; N. Y. Yamasaki; R. Fujimoto; N. Iyomoto; T. Oshima; K. Futamoto; Y. Takei; T. Ichitsubo; T. Fujimori; Y. Ishisaki; U. Morita; T. Koga; K. Sato; T. Ohashi; Y. Kuroda; M. Onishi; K. Otake

doi:10.1109/SENSOR.2003.1216963

Prototype of the multi-pixel X-ray microcalorimeter

H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, H. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N. Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. FujimoriY. Ishisaki, U. Morita, T. Koga, K. Sato, T. Ohashi, Y. Kuroda, M. Onishi, K. Otake

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.

Original language	English
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1108-1111
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1216963
Publication status	Published - 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	2

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	03/6/8 → 03/6/12

Keywords

Bismuth
Energy resolution
Gratings
High-resolution imaging
Optical imaging
Prototypes
Spectroscopy
Testing
Tin
X-ray imaging

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2003.1216963

Cite this

Kudo, H., Nakamura, T., Arakawa, T., Ohtsuka, S., Izumi, T., Shoji, S., Sato, H., Kobayashi, H., Mori, K., Homma, T., Osaka, T., Mitsuda, K., Yamasaki, N. Y., Fujimoto, R., Iyomoto, N., Oshima, T., Futamoto, K., Takei, Y., Ichitsubo, T., ... Otake, K. (2003). Prototype of the multi-pixel X-ray microcalorimeter. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1108-1111). Article 1216963 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216963

Prototype of the multi-pixel X-ray microcalorimeter. / Kudo, H.; Nakamura, T.; Arakawa, T. et al.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1108-1111 1216963 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kudo, H, Nakamura, T, Arakawa, T, Ohtsuka, S, Izumi, T, Shoji, S, Sato, H, Kobayashi, H, Mori, K, Homma, T, Osaka, T, Mitsuda, K, Yamasaki, NY, Fujimoto, R, Iyomoto, N, Oshima, T, Futamoto, K, Takei, Y, Ichitsubo, T, Fujimori, T, Ishisaki, Y, Morita, U, Koga, T, Sato, K, Ohashi, T, Kuroda, Y, Onishi, M & Otake, K 2003, Prototype of the multi-pixel X-ray microcalorimeter. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1216963, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1108-1111, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03/6/8. https://doi.org/10.1109/SENSOR.2003.1216963

Kudo H, Nakamura T, Arakawa T, Ohtsuka S, Izumi T, Shoji S et al. Prototype of the multi-pixel X-ray microcalorimeter. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1108-1111. 1216963. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1216963

Kudo, H. ; Nakamura, T. ; Arakawa, T. et al. / Prototype of the multi-pixel X-ray microcalorimeter. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1108-1111 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

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title = "Prototype of the multi-pixel X-ray microcalorimeter",

abstract = "An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.",

keywords = "Bismuth, Energy resolution, Gratings, High-resolution imaging, Optical imaging, Prototypes, Spectroscopy, Testing, Tin, X-ray imaging",

author = "H. Kudo and T. Nakamura and T. Arakawa and S. Ohtsuka and T. Izumi and S. Shoji and H. Sato and H. Kobayashi and K. Mori and T. Homma and T. Osaka and K. Mitsuda and Yamasaki, {N. Y.} and R. Fujimoto and N. Iyomoto and T. Oshima and K. Futamoto and Y. Takei and T. Ichitsubo and T. Fujimori and Y. Ishisaki and U. Morita and T. Koga and K. Sato and T. Ohashi and Y. Kuroda and M. Onishi and K. Otake",

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doi = "10.1109/SENSOR.2003.1216963",

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AU - Kudo, H.

AU - Nakamura, T.

AU - Arakawa, T.

AU - Ohtsuka, S.

AU - Izumi, T.

AU - Shoji, S.

AU - Sato, H.

AU - Kobayashi, H.

AU - Mori, K.

AU - Homma, T.

AU - Osaka, T.

AU - Mitsuda, K.

AU - Yamasaki, N. Y.

AU - Fujimoto, R.

AU - Iyomoto, N.

AU - Oshima, T.

AU - Futamoto, K.

AU - Takei, Y.

AU - Ichitsubo, T.

AU - Fujimori, T.

AU - Ishisaki, Y.

AU - Morita, U.

AU - Koga, T.

AU - Sato, K.

AU - Ohashi, T.

AU - Kuroda, Y.

AU - Onishi, M.

AU - Otake, K.

PY - 2003

Y1 - 2003

N2 - An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.

AB - An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.

KW - Bismuth

KW - Energy resolution

KW - Gratings

KW - High-resolution imaging

KW - Optical imaging

KW - Prototypes

KW - Spectroscopy

KW - Testing

KW - Tin

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T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

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BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers

Y2 - 8 June 2003 through 12 June 2003

ER -

Prototype of the multi-pixel X-ray microcalorimeter

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Keywords

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