Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor

Kensaku Yamamoto; Keisuke Naka; Yasuhiro Nagaura; Hironobu Sato; Shuichi Shoji; Satoshi Konishi

Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor

Kensaku Yamamoto^*, Keisuke Naka, Yasuhiro Nagaura, Hironobu Sato, Shuichi Shoji, Satoshi Konishi

^*Corresponding author for this work

School of Fundamental Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

13 Citations (Scopus)

Abstract

This paper presents a novel means of introducing conductive pyrolyzed polymer structures into a μTAS platform. Insulation structures of polymer materials can be transformed into conductive structures through pyrolysis, and MEMS structures consisting of pyrolyzed polymer can be formed by a dual process of micromachining and pyrolysis. This work focuses on gate type sensing by a three-dimensional pyrolyzed polymer electrode. The three-dimensional SU-8 original structure was micromachined by multi-angle inclined lithography. Three-dimensional structures of pyrolyzed SU-8, which have meshes of 10 μm × 20 μm in dimension, could be obtained by pyrolysis in N₂ atmosphere. Furthermore, the structures were integrated into the SU-8 fluidic channel with the 100 μm in height and 200 μm in width by a post-pyrolysis process. We will demonstrate the cross sectional sensing in electrochemical detection by making the best use of the three-dimensional mesh structure to overcome the restriction of planar electrode.

Original language	English
Title of host publication	Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages	271-274
Number of pages	4
Publication status	Published - 2007
Event	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: 2007 Jan 21 → 2007 Jan 25

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/Territory	Japan
City	Kobe
Period	07/1/21 → 07/1/25

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

Yamamoto, K., Naka, K., Nagaura, Y., Sato, H., Shoji, S., & Konishi, S. (2007). Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007 (pp. 271-274). [4432966] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor. / Yamamoto, Kensaku; Naka, Keisuke; Nagaura, Yasuhiro et al.
Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 271-274 4432966 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yamamoto, K, Naka, K, Nagaura, Y, Sato, H, Shoji, S & Konishi, S 2007, Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor. in Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007., 4432966, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 271-274, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 07/1/21.

Yamamoto K, Naka K, Nagaura Y, Sato H, Shoji S, Konishi S. Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 271-274. 4432966. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Yamamoto, Kensaku ; Naka, Keisuke ; Nagaura, Yasuhiro et al. / Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor. Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. pp. 271-274 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor",

abstract = "This paper presents a novel means of introducing conductive pyrolyzed polymer structures into a μTAS platform. Insulation structures of polymer materials can be transformed into conductive structures through pyrolysis, and MEMS structures consisting of pyrolyzed polymer can be formed by a dual process of micromachining and pyrolysis. This work focuses on gate type sensing by a three-dimensional pyrolyzed polymer electrode. The three-dimensional SU-8 original structure was micromachined by multi-angle inclined lithography. Three-dimensional structures of pyrolyzed SU-8, which have meshes of 10 μm × 20 μm in dimension, could be obtained by pyrolysis in N2 atmosphere. Furthermore, the structures were integrated into the SU-8 fluidic channel with the 100 μm in height and 200 μm in width by a post-pyrolysis process. We will demonstrate the cross sectional sensing in electrochemical detection by making the best use of the three-dimensional mesh structure to overcome the restriction of planar electrode.",

author = "Kensaku Yamamoto and Keisuke Naka and Yasuhiro Nagaura and Hironobu Sato and Shuichi Shoji and Satoshi Konishi",

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AU - Yamamoto, Kensaku

AU - Naka, Keisuke

AU - Nagaura, Yasuhiro

AU - Sato, Hironobu

AU - Shoji, Shuichi

AU - Konishi, Satoshi

PY - 2007

Y1 - 2007

N2 - This paper presents a novel means of introducing conductive pyrolyzed polymer structures into a μTAS platform. Insulation structures of polymer materials can be transformed into conductive structures through pyrolysis, and MEMS structures consisting of pyrolyzed polymer can be formed by a dual process of micromachining and pyrolysis. This work focuses on gate type sensing by a three-dimensional pyrolyzed polymer electrode. The three-dimensional SU-8 original structure was micromachined by multi-angle inclined lithography. Three-dimensional structures of pyrolyzed SU-8, which have meshes of 10 μm × 20 μm in dimension, could be obtained by pyrolysis in N2 atmosphere. Furthermore, the structures were integrated into the SU-8 fluidic channel with the 100 μm in height and 200 μm in width by a post-pyrolysis process. We will demonstrate the cross sectional sensing in electrochemical detection by making the best use of the three-dimensional mesh structure to overcome the restriction of planar electrode.

AB - This paper presents a novel means of introducing conductive pyrolyzed polymer structures into a μTAS platform. Insulation structures of polymer materials can be transformed into conductive structures through pyrolysis, and MEMS structures consisting of pyrolyzed polymer can be formed by a dual process of micromachining and pyrolysis. This work focuses on gate type sensing by a three-dimensional pyrolyzed polymer electrode. The three-dimensional SU-8 original structure was micromachined by multi-angle inclined lithography. Three-dimensional structures of pyrolyzed SU-8, which have meshes of 10 μm × 20 μm in dimension, could be obtained by pyrolysis in N2 atmosphere. Furthermore, the structures were integrated into the SU-8 fluidic channel with the 100 μm in height and 200 μm in width by a post-pyrolysis process. We will demonstrate the cross sectional sensing in electrochemical detection by making the best use of the three-dimensional mesh structure to overcome the restriction of planar electrode.

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M3 - Conference contribution

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007

T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007

Y2 - 21 January 2007 through 25 January 2007

ER -

Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor

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