Quality control of epitaxial LiCoO2 thin films grown by pulsed laser deposition

T. Ohnishi*, B. T. Hang, X. Xu, M. Osada, K. Takada

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)


Thin films of c-axis-oriented LiCoO2were epitaxially grown by pulsed laser deposition (PLD). The ablation laser conditions greatlyaffect the crystal quality of the epitaxial LiCoO2thin films. In addition, high-quality LiCoO2thin films were found to grow without any impurity phases under relatively low oxygen partial pressure,although high pressure had been often selected to suppress the formation of Co3O4 with a lower valence state as an impurity.This result clearly indicates that the ablation laser conditions are an essential growth parameter, and that composition control is indispensable to grow high-quality complex compound thin films by PLD.

Original languageEnglish
Pages (from-to)1886-1889
Number of pages4
JournalJournal of Materials Research
Issue number10
Publication statusPublished - 2010 Oct
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanical Engineering
  • Mechanics of Materials
  • Condensed Matter Physics


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