Abstract
The authors are developing several kinds of micromechanical devices (MMD) made from quartz crystal using photolithography and anisotropic etching. A description is given of the mechanical and chemical properties of the quartz crystal used in MMDs, and the mirror galvanometer movement and pressure transducer which use such devices.
| Original language | English |
|---|---|
| Title of host publication | Unknown Host Publication Title |
| Place of Publication | New York, NY, USA |
| Publisher | IEEE |
| Pages | 113-116 |
| Number of pages | 4 |
| Publication status | Published - 1985 |
| Externally published | Yes |
ASJC Scopus subject areas
- Engineering(all)